MEMS stands for a micro electro mechanical system, It is the process of used to create tiny integrated devices or systems that combine mechanical and electrical components or devices. They are fabricated using the IC batch processing techniques and can range in the size from a few micrometers to millimeters. Now let us discuss the advantages and disadvantages of MEMS technology to better understand this topic
Advantages or benefits of MEMS:
- MEMS switches and actuators also can attain very high frequencies.
- MEMS devices require very low power consumption.
- MEMS can be readily integrated with microelectronics to achieve an embedded mechatronic system.
- It improved reproductivity.
- Higher accuracy, sensitivity, and selectivity.
- MEMS sensors possess extremely high sensitivity.
- Extremely it scalable in manufacturing, resulting in very low unit costs when mass is produced.
- Scaling effect at microscopic levels can be leveraged to achieve the design and dynamic mechanisms otherwise not possible at micro scales.
- Easier to alter the part of a device as compared to its macro counterparts.
Disadvantages or drawback of MEMS:
- Very expensive during the research and development stage any new MEMS design or devices.
- Fabrication and assembly unit costs can be very high for low quantities. therefore, MEMS are not suitable for only niche applications, unless cost is not an issue.
- Polysilicon is a brittle material.
- Farm establishment requires a huge investment.
- Prior knowledge is needed to integrate MEMS device
- The design includes very complex procedure.
- Very expensive upfront setup cost for fabrication cleanrooms and boundary facilities.
- Testing equipment to characterize the quality and performance can also be expensive.