MERIE full form

What is the full form of MERIE?


  • Magnetically Enhanced Reactive Ion Etching

What does MERIE mean?

MERIE involves applying a magnetic field to a capacitively coupled plasma etcher. For a given RF power setting, An applied magnetic field improves the etch rate while simultaneously lowering the bias voltage. The current between the four electromagnetic coils placed around the is varied to create a rotating magnetic field.