What is the full form of LPCVD?
Answer:
- Low-Pressure Chemical Vapor Deposition
What does LPCVD mean?
LPCVD is a type of chemical vapor deposition that uses heat to start a reaction between gas and solid substract. The solid phase material is formed as a result of the reaction at the surface. LP is is used to reduce any undesirable gas phase reactions while also increasing uniformity across the substrate.